Preface Panagiotis Dimitrakis, Yoshihisa Fujisaki, Guohan Hu, Eisuke Tokumitsu
Materials Research Society Symposium Proceedings, 1729, -, 2015
Tutorial 1:Materials and Processes for Nonvolatile Memories---Ferroelectric Materials and FeRAM---
Eisuke Tokumitsu
-, 2007
FeRAMの最近の進展と強誘電体ゲート構造メモリ
徳光永輔
JSAP Catalog, AP072329, 55-60, 2007
Tutorial 1:Materials and Processes for Nonvolatile Memories---Ferroelectric Materials and FeRAM---
Eisuke Tokumitsu
-, 2007
Fabrication of Transparent Ferroelectric-Gate Thin Film Transistors with Nonvolatile Memory Operation
Eisuke Tokumitsu, Masaru Senoo, Etsu Shin
Materials Research Society Symp. Proc., 902E, T10-54.1-54.6-, 2006
Fabrication of Transparent Ferroelectric-Gate Thin Film Transistors with Nonvolatile Memory Operation
Eisuke Tokumitsu, Masaru Senoo, Etsu Shin
Materials Research Society Symp. Proc., 902E, T10-54.1-54.6-, 2006
Effect of deposition temperature on the characteristics of hafnium oxide films deposited by metalorganic chemical vapor deposition using amide precursor K Takahashi, H Funakubo, S Hino, M Nakayama, N Ohashi, T Kiguchi, E Tokumitsu
JOURNAL OF MATERIALS RESEARCH, 19, 2, 584-589, 2004
Ferroelectric-gate structures using ferroelectric (Sr,Sm)Bi_2_Ta_2_O_9_ films with Al_2_O_3_/Si_3_N_4_ buffer layer
E.Tokumitsu, M.Kishi, K.Iseki, Y.Fujisaki H.Ishiwara
2003 Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices, -, 2003
交互供給MOCVD法によるゲート絶縁膜用HfO2薄膜の作成と評価
中山誠, 高橋健治, 日野史郎, 舟窪浩, 徳光永輔
応用物理学会薄膜・表面分科会(第8回研究会), -, 2003
HfO2のMOCVD成膜におけるH2O酸化剤の効果
徳光永輔, 中山誠, 日野史郎, 高橋健治, 舟窪浩
電子情報通信学会シリコン材料・デバイス研究会, -, 2003
交互供給MOCVD法によるゲート絶縁膜用HfO2薄膜の作製と評価
中山誠, 高橋健治, 日野史郎, 舟窪浩, 徳光永輔
電子情報通信学会総合大会, -, 2003
HfO2 Thin Films with Low Residua Impurity Concentrations Grown on Si Substrates by Metal-Organic Chemical Vapor Deposition Using Hf(O-t-C4H9)4 and H2O
Eisuke Tokumitsu, K. Takahashi, M. Nakayama, S. Hino, Hiroshi Funakubo
The IEEE 2003 International Meeting for Future of Electron Devices, E-3, -, 2003
構造中に酸素を含まないHfを用いたMOCVD法によるHfO_2_薄膜の合成と評価
高橋健治, 中山誠, 水平学, 徳光永輔, 舟窪浩
応用物理学会2002年春講演会, 28p-A-11, 821-, 2002
Hf(O・t-C_4_H_9_)_4_ を用いたMOCVD法によるHfO_2_薄膜の作製と特性評価
中山誠, 高橋健治, 舟窪浩, 徳光永輔
応用物理学会2002年春講演会, 28p-A-12, 821-, 2002
Hf[(C_2_H_5_)_2_]_4_から合成した高誘電率界面層を有するHfO_2_薄膜の特性評価
高橋健治, 中山誠, 日野史郎, 舟窪浩, 徳光永輔
応用物理学会2002年秋講演会, 25a-C-2, 721-, 2002
Characterization of HfO2 Films Grown on Silicon Substrate by metal-organic Chemical Vapor Deposition
Eisuke Tokumitsu, Kenji Takahashi, Makoto Nakayam, Hiroshi Funakubo
Fourth International Symposium on Control of Semiconductor Interface, 2-10, 2002
Low leakage La_2_O_3_ gate insulator film with EOT of 0.8-1.2nm
S.Ohmi C.Kobayashi, E.Tokumitsu, H.Ishiwara H.Iwai
2001 Intern. Conf. on Solid State Devies and Materials, Tokyo, No.B-9-1, 496-497, 2001
Fabrication of PZT films on Si substrates by sol-gel method using Y_2_O_3_ buffer layers
B-E. Park, E. Tokumitsu, H. Ishiwara
12th Intern. Sympo. on. Integrated Ferroelectrics, 196-, 2000
Adaptive-learning neuron circuit using ferroelectric-gate FETs
S-M.Yoon, E.Tokumitsu, H.Ishiwara
12th Intern. Sympo. on. Integrated Ferroelectrics, 331-, 2000
ゾルゲル法による(Bi,La)_4_Ti_3_O_12_/SiN/Si構造の作製
木島健, 磯辺武揚, 徳光永輔, 石原宏
第61回応用物理学会学術講演会, 7a-G-11/II-, 2000
New Pt/(Bi,La)_4_Ti_3_O_12_/Si_3_N_4_/Si MFIS structure for FET-type ferroelectric memories by the sol-gel method
T. Kijima, Y. Fujisaki T. Isobe, E. Tokumitsu, H. Ishiwara
Mater. Res. Soc. Sympo. (Ferroelectric Thin films IX), CC-3.6,-, 2000
Sr、Ta新原料を用いた溶液気化MOCVD法によるSBT薄膜の作成
藤井俊成, 神保武人, 舟窪浩, 徳光永輔, 石原宏
応用物理学会, 30a-P11-10, 528-, 2000
溶液気化MOCVD法により作成したSrBi2Ta2O9薄膜の評価と膜質改善
神保武人, 藤井俊成, 磯部武揚, 舟窪浩, 徳光永輔, 石原宏
応用物理学会, 30a-P11-31, 535-, 2000
BaMgF_4_/Pt/SiO_2_/Si構造MFMIS-FETの特性評価(2)
西山淳, 會澤康治, 徳光永輔, 石原宏
第46回応用物理学関係連合講演会, 31p-K-9/II-, 1999
Y_2_O_3_バッファー層を用いたPLZT薄膜のSi基板上への形成
高橋大輔, 朴炳垠, 徳光永輔, 石原宏
第60回応用物理学会学術講演会, 2p-A-2/II-, 1999
Characterization of Pt/SrBi_2_Ta_2_O_9_/Pt/SiO_2_/Si MFMIS structures for ferroelectric-gate FET applications
E. Tokumitsu, A. Amano, G. Fujii, H. Ishiwara
Abst. of '99 Asian Conf. on Electrochemistry, 1PA10, 64-, 1999
Characterization of MFIS and MFMIS structures using SrBi_2_Ta_2_O_9_ film with SrTa_2_O_6_/SiON stacked buffer layer
E. Tokumitsu, G. Fujii, H. Ishiwara
41st Electronic. Mater. Conf., O-6-, 1999
Electrical properties of Pt/SrBi_2_Ta_2_O_9_/Pt/SiO_2_/Si MFMIS structures and FETs with various area rations of MFM capacitor to Pt floating gate
E. Tokumitsu, A. Amano, G. Fujii, H. Ishiwara
Technical report of IEICE, SDM99-95-, 1999
Fabrication and characterization of neuron circuits using ferroelectric-gate transistors
E. Tokumitsu, S-M. Yoo, H. Ishiwara
-, 1999
PREPARATION AND CHARACTERIZATION OF Bi2VO5.5 FILMS BY MOD METHOD
E.TOKUMITSU, Yuji TAKAHASHI, H.ISHIWARA
Mater. Res. Soc. Sympo. Proc., 541, 555-560, 1999
Ferroelectric properties of BaMgF4 films grown on Si(100), (111), and Pt(111)/SiO2/Si(100) structures K Aizawa, T Ichiki, T Okamoto, E Tokumitsu, H Ishiwara
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 35, 2B, 1525-1530, 1996
Characterization of ferroelectric BaMgF4 films grown on AlGaAs/GaAs (100) high-electron-mobility transistor structures
Shun-ichiro Ohmi, Eisuke Tokumitsu, Hiroshi Ishiwara
Journal of Crystal Growth, 150, 1104-1107, 1995
Heavily carbon doped p-type GaAs/InxGa1-xAs strained-layer superlattices grown by MOMBE Ming Qi, Jinsheng Luo, J. Shirakashi, T. Yamada, S. Nozaki, K. Tadahashi, H. Kashima, E. Tokumitsu, M. Konagai
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors, 14, 462-467, 1993
Growth and characteristics of carbon doped InxGa1-xAs by MOMBE Ming Qi, Jinsheng Luo, J. Shirakashi, T. Yamada, S. Nozaki, K. Takahashi, E. Tokumitsu, M. Konagai
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors, 14, 402-409, 1993
Study on thermal stability of carbon-doped GaAs using novel metalorganic molecular beam epitaxial structures Shinji Nozaki, Kiyoshi Takahashi, Masanori Shirahama, Keisuke Nagao, Junichi Shirakashi, Eisuke Tokumitsu, Makoto Konagai
Applied Physics Letters, 62, 16, 1913-1915, 1993
HEAVILY CARBON-DOPED P-TYPE INGAAS BY MOMBE E TOKUMITSU, J SHIRAKASHI, M QI, T YAMADA, S NOZAKI, M KONAGAI, K TAKAHASHI
JOURNAL OF CRYSTAL GROWTH, 120, 1-4, 301-305, 1992
EXTREMELY LOW NONALLOYED SPECIFIC CONTACT RESISTANCE RHO-C (10(-8) OMEGA CM(2)) TO METALORGANIC MOLECULAR-BEAM EPITAXY GROWN SUPER HEAVILY HEAVILY C-DOPED (10(21) CM(-3))RHO++GAAS T USAGAWA, M KOBAYASHI, T MISHIMA, PD RABINZOHN, A IHARA, M KAWATA, T YAMADA, E TOKUMITSU, M KONAGAI, K TAKAHASHI
JOURNAL OF APPLIED PHYSICS, 69, 12, 8227-8232, 1991
GaAs pseudo-heterojunction bipolar transistor with a heavily carbon-doped base Shinji Nozaki, Ryuji Miyake, Junichi Shirakashi, Ming Qi, Takumi Yamada, Eisuke Tokumitsu, Makoto Konagai, Kiyoshi Takahashi, Kazuhiko Matsumoto
Conference on Solid State Devices and Materials, 356-358, 1991
A Monolithic Long Wavelength Photoreceiver Using Heterojunction Bipolar Transistors S. Chandrasekhar, Bart C. Johnson, Eisuke Tokumitsu, Andrew G. Dentai, Charles H. Joyner, Alan H. Gnauck, Joseph S. Perino, G. J. Qua
IEEE Journal of Quantum Electronics, 27, 773-777, 1991
P-type carbon-doped ingaas grown by metalorganic molecular beam epitaxy Jun-Ichi Shirakashi, Takumi Yamada, Ming Qi, Shinji Nozaki, Kiyoshi Takahashi, Eisuke Tokumitsu, Makoto Konagai
Japanese Journal of Applied Physics, 30, 9, L1609-L1611, 1991
Gaas pseudo-heterojunction bipolar transistor with a heavily carbon-doped base Shinji Nozaki1, Koki Saito2, Junichi Shirakashi1, Ming Qi1, Takumi Yamada 1, Eisuke Tokumitsu3, Makoto Konagai2, Kiyoshi Takahashi 1, Kazuhiko Matsumoto4
Japanese Journal of Applied Physics, 30, 12, 3840-3842, 1991
METALLIC P-TYPE GAAS AND INGAAS GROWN BY MOMBE M KONAGAI, T YAMADA, T AKATSUKA, S NOZAKI, R MIYAKE, K SAITO, T FUKAMACHI, E TOKUMITSU, K TAKAHASHI
JOURNAL OF CRYSTAL GROWTH, 105, 1-4, 359-365, 1990
An In0P/InGaAs p-i-n/HBT Monolithic Transimpedance Photoreceiver S. Chandrasekhar, B. C. Johnson, M. Bonnemason, E. Tokumitsu, A. H. Gnauck, A. G. Dentai, C. H. Joyner, J. S. Perino, G. J. Qua, E. M. Monberg
IEEE Photonics Technology Letters, 2, 505-506, 1990
INTEGRATED INP/INGAAS HBT PREAMPLIFIER FOR AN OPTICAL RECEIVER S CHANDRASEKHAR, BC JOHNSON, E TOKUMITSU, AG DENTAI, CH JOYNER, AH GNAUCK, JS PERINO, GJ QUA, CA BURRUS
SECOND INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE AND RELATED MATERIALS, 171-174, 1990
HEAVILY CARBON DOPED PARA-TYPE GAAS AND GAALAS GROWN BY METALORGANIC MOLECULAR-BEAM EPITAXY T YAMADA, E TOKUMITSU, K SAITO, T AKATSUKA, M MIYAUCHI, M KONAGAI, K TAKAHASHI
JOURNAL OF CRYSTAL GROWTH, 95, 1-4, 145-149, 1989
Effect of heavy doping on band gap and minority carrier transport of AlGaAs/GaAs HBT’s Koki Saito, Takumi Yamada, Takeshi Akatsuka, Taichi Fukamachi, Eisuke Tokumitsu, Makoto Konagai, Kiyoshi Takahashi
Japanese Journal of Applied Physics, 28, 11 A, L2081-L2084, 1989
Characterization of p-type GaAs heavily doped with carbon grown by metalorganic molecular-beam epitaxy Koki Saito, Eisuke Tokumitsu, Takeshi Akatsuka, Motoya Miyauchi, Takumi Yamada, Makoto Konagai, Kiyoshi Takahashi
Journal of Applied Physics, 64, 8, 3975-3979, 1988
SUPERLATTICE STRUCTURES GROWN BY METALORGANIC MBE E TOKUMITSU, T KATOH, CP SUNG, A SANDHU, R KIMURA, M KONAGAI, K TAKAHASHI
SURFACE SCIENCE, 174, 1-3, 43-47, 1986