Fabrication and Characterizations of Axial View Liquid Electrode Plasma Atomic Emission Spectrometry for the Sensitive Determination of Trace Zinc, Cadmium, and Lead Yueh Han Huang, Daisuke Hirose, Jun Minami, Meng Jiy Wang, Yuzuru Takamura
Analytical Chemistry, 94, 23, 8209-8216, 2022
Development of robust isothermal RNA amplification assay for lab-free testing of RNA viruses Radhika Biyani, Kirti Sharma, Kenji Kojima, Madhu Biyani, Vishnu Sharma, Tarun Kumawat, Kevin Maafu Juma, Itaru Yanagihara, Shinsuke Fujiwara, Eiichi Kodama, Yuzuru Takamura, Masahiro Takagi, Kiyoshi Yasukawa, Manish Biyani
Scientific Reports, 11, 1, -, 2021
High-transconductance indium oxide transistors with a lanthanum-zirconium gate oxide characteristic of an electrolyte Jinwang Li, Hirokazu Tsukada, Takaaki Miyasako, Phan Trong Tue, Kazuhiro Akiyama, Hiromi Nakazawa, Yuzuru Takamura, Tadaoki Mitani, Tatsuya Shimoda
Journal of Applied Physics, 127, 6, -, 2020
DOCK11 and DENND2A play pivotal roles in the maintenance of hepatitis B virus in host cells Shinichi Hashimoto, Takayoshi Shirasaki, Taro Yamashita, Sadahiro Iwabuchi, Yutaka Suzuki, Yuzuru Takamura, Yoshiaki Ukita, Shungo Deshimaru, Toshitugu Okayama, Kazuho Ikeo, Kazuyuki Kuroki, Kazunori Kawaguchi, Eishiro Mizukoshi, Kouji Matsushima, Masao Honda, Shuichi Kaneko
PLoS ONE, 16, 2 February, -, 2021
Speciation of inorganic selenium in wastewater using liquid electrode plasma-optical emission spectrometry combined with supramolecule-equipped solid-phase extraction system Suman Barua, Ismail M. M. Rahman, Maho Miyaguchi, Kouki Yunoshita, Prasongporn Ruengpirasiri, Yuzuru Takamura, Asami S. Mashio, Hiroshi Hasegawa
MICROCHEMICAL JOURNAL, 159, -, 2020
Black tea polyphenol theaflavin as promising antioxidant and potential copper chelator Sharma, Neha, Phan, Huong T., Chikae, Miyuki, Takamura, Yuzuru, Azo-Oussou, Auriane F., Vestergaard, Mun'delanji C.
Journal of the Science of Food and Agriculture, 100, 7, 3126-3135, 2020
Developing conductive highly ordered zinc oxide nanorods by acetylacetonate-assisted growth Siti Shafura A. Karim, Yuzuru Takamura, Phan Trong Tue, Nguyen Thanh Tung, Jamal Kazmi, Chang Fu Dee, Burhanuddin Yeop Majlis, Mohd Ambri Mohamed
Materials, 13, 5, -, 2020
Organic ion-associate phase extraction/back-microextraction for the preconcentration and determination of lithium using 2,2,6,6-tetramethyl-3,5-heptanedione by liquid electrode plasma atomic emission spectrometry and GF-AAS in environmental water Kenta Mizuna, Ryo Murashima, Takuya Okazaki, Kazuto Sazawa, Hideki Kuramitz, Shigeru Taguchi, Keiko Nakayama, Tamotsu Yamamoto, Yuzuru Takamura, Noriko Hata
Analytical Sciences, 36, 5, 595-600, 2020
Thermoelectric Properties and Carrier Localization in Ultrathin Layer of Nb-Doped MoS2 Pham Xuan Thi, Masanobu Miyata, Huynh Van Ngoc, Pham Tien Lam, Nguyen Thanh Tung, Manoharan Muruganathan, Phan Trong Tue, Masashi Akabori, Dam Hieu Chi, Hiroshi Mizuta, Yuzuru Takamura, Mikio Koyano
Physica Status Solidi (B) Basic Research, 255, 9, -, 2018
Host Cell Prediction of Exosomes Using Morphological Features on Solid Surfaces Analyzed by Machine Learning Ito Kazuki, Ogawa Yuta, Yokota Keiji, Matsumura Sachiko, Minamisawa Tamiko, Suga Kanako, Shiba Kiyotaka, Kimura Yasuo, Hirano-Iwata Ayumi, Takamura Yuzuru, Ogino Toshio
JOURNAL OF PHYSICAL CHEMISTRY B, 122, 23, 6224-6235, 2018
Instant enumeration of total viable bacterial counts for food quality assurance using ‘DEP-On-Go’ sensor Madhu Biyani, Radhika Biyani, Hiromi Ushijima, Masato Saito, Yuzuru Takamura, Eiichi Tamiya, Manish Biyani
Analytical Methods, 10, 14, 1585-1592, 2018
Effect of ultraviolet/ozone treatment on the structural and electrical properties of solution-processed piezoelectric thick-film lead-zirconium-titanate Phan Trong Tue, Reijiro Shimura, Kazuhiro Fukada, Keisuke Satou, Jinwang Li, Tatsuya Shimoda, Yuzuru Takamura
International Journal of Nanotechnology, 15, 1-3, 69-77, 2018
Development of glutamate biosensor based on the integration of network SWCNT-FET and glutamate-binding protein Nguyen T. Tung, Trisha D. Farha, Hidekazu Tsutsui, Truong T.N. Lien, Yasuhide Ohno, Kenzo Maehashi, Kazuhiko Matsumoto, Manish Biyani, Phan T. Tue, Yuzuru Takamura
22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018, 2, 795-797, 2018
Peptide aptamer-modified single-walled carbon nanotube-based transistors for high-performance biosensors Nguyen Thanh Tung, Phan Trong Tue, Truong Thi Ngoc Lien, Yasuhide Ohno, Kenzo Maehashi, Kazuhiko Matsumoto, Koichi Nishigaki, Manish Biyani, Yuzuru Takamura
SCIENTIFIC REPORTS, 7, -, 2017
Tapered microelectrode array system for dielectrophoretically Filtration: Fabrication, characterization, and simulation study Muhamad Ramdzan Buyong, Farhad Larki, Yuzuru Takamura, Burhanuddin Yeop Majlis
Journal of Micro/ Nanolithography, MEMS, and MOEMS, 16, 4, -, 2017
Comprehensive single-cell transcriptome analysis reveals heterogeneity in endometrioid adenocarcinoma tissues Shinichi Hashimoto, Yuta Tabuchi, Hideaki Yurino, Yoshihiko Hirohashi, Shungo Deshimaru, Takuya Asano, Tasuku Mariya, Kenshiro Oshima, Yuzuru Takamura, Yoshiaki Ukita, Akio Ametani, Naoto Kondo, Norikazu Monma, Tadayuki Takeda, Sadahiko Misu, Toshitugu Okayama, Kazuho Ikeo, Tsuyoshi Saito, Shuich Kaneko, Yutaka Suzuki, Masahira Hattori, Kouji Matsushima, Toshihiko Torigoe
SCIENTIFIC REPORTS, 7, -, 2017
DEP-On-Go for Simultaneous Sensing of Multiple Heavy Metals Pollutants in Environmental Samples Madhu Biyani, Radhika Biyani, Tomoko Tsuchihashi, Yuzuru Takamura, Hiromi Ushijima, Eiichi Tamiya, Manish Biyani
SENSORS, 17, 1, -, 2017
PEP-on-DEP: A competitive peptide-based disposable electrochemical aptasensor for renin diagnostics Manish Biyani, Keiko Kawai, Koichiro Kitamura, Miyuki Chikae, Madhu Biyani, Hiromi Ushijima, Eiichi Tamiya, Takashi Yoneda, Yuzuru Takamura
BIOSENSORS & BIOELECTRONICS, 84, 120-125, 2016
Implementing the concept of dielectrophoresis in glomerular filtration of human kidneys Muhamad Ramdzan Buyong, Farhad Larki, Yuzuru Takamura, Norazreen Abd Aziz, Jumril Yunas, Azrul Azlan Hamzah, Burhanuddin Yeop Majlis
IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE, 2016-, 33-37, 2016
Impact of New Quick Gold Nanoparticle-Based Cortisol Assay During Adrenal Vein Sampling for Primary Aldosteronism Takashi Yoneda, Shigehiro Karashima, Mitsuhiro Kometani, Mikiya Usukura, Masashi Demura, Junichirou Sanada, Tetsuya Minami, Wataru Koda, Toshifumi Gabata, Osamu Matsui, Koutarou Idegami, Yuzuru Takamura, Eiichi Tamiya, Masashi Oe, Masuo Nakai, Shunsuke Mori, Noboru Terayama, Yuichi Matsuda, Kouhei Kamemura, Sumie Fujii, Takashi Seta, Toshitaka Sawamura, Rika Okuda, Yoshimichi Takeda, Kenshi Hayashi, Masakazu Yamagishi, Yoshiyu Takeda
JOURNAL OF CLINICAL ENDOCRINOLOGY & METABOLISM, 101, 6, 2554-2561, 2016
Atomic emission spectrometry in liquid electrode plasma using an hourglass microchannel Yoshinobu Kohara, Yasushi Terui, Megumi Ichikawa, Kazuko Yamamoto, Toshihiro Shirasaki, Kimiyoshi Kohda, Tamotsu Yamamoto, Yuzuru Takamura
JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 30, 10, 2125-2128, 2015
Solution processing of microcavity for BioMEMS application Vu Nam Luong, Yoshiaki Ukita, Yuzuru Takamura, Tadaoki Mitani, Tatsuya Shimoda, Thi My Dung Dang, Mau Chien Dang
Advances in Natural Sciences: Nanoscience and Nanotechnology, 5, 3, -, 2014
Solution processing of microcavity for BioMEMS application Vu Nam Luong, Yoshiaki Ukita, Yuzuru Takamura, Tadaoki Mitani, Tatsuya Shimoda, Thi My Dung Dang, Mau Chien Dang
ADVANCES IN NATURAL SCIENCES-NANOSCIENCE AND NANOTECHNOLOGY, 5, 3, -, 2014
Development of the automated gold-linked electrochemical immunoassay system for blood monitoring Suguru Shiohara, Miyuki Chikae, Yoshiaki Ukita, Hiromi Ushijima, Yasukazu Fukumura, Toshinari Takamura, Yuzuru Takamura
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 20, 2, 273-279, 2014
Gold-linked electrochemical immunoassay on single-walled carbon nanotube for highly sensitive detection of human chorionic gonadotropin hormone Nguyen Xuan Viet, Miyuki Chikae, Yoshiaki Ukita, Kenzo Maehashi, Kazuhiko Matsumoto, Eiichi Tamiya, Pham Hung Viet, Yuzuru Takamura
BIOSENSORS & BIOELECTRONICS, 42, 592-597, 2013
Gold-linked electrochemical immunoassay on single-walled carbon nanotube for highly sensitive detection of human chorionic gonadotropin hormone Nguyen Xuan Viet, Miyuki Chikae, Yoshiaki Ukita, Kenzo Maehashi, Kazuhiko Matsumoto, Eiichi Tamiya, Pham Hung Viet, Yuzuru Takamura
BIOSENSORS & BIOELECTRONICS, 42, 592-597, 2013
Fabrication of new single-walled carbon nanotubes microelectrode for electrochemical sensors application Nguyen Xuan Viet, Yoshiaki Ukita, Miyuki Chikae, Yasuhide Ohno, Kenzo Maehashi, Kazuhiko Matsumoto, Pham Hung Viet, Yuzuru Takamura
TALANTA, 91, 88-94, 2012
Fabrication of new single-walled carbon nanotubes microelectrode for electrochemical sensors application Nguyen Xuan Viet, Yoshiaki Ukita, Miyuki Chikae, Yasuhide Ohno, Kenzo Maehashi, Kazuhiko Matsumoto, Pham Hung Viet, Yuzuru Takamura
TALANTA, 91, 88-94, 2012
Characteristics of liquid electrode plasma for atomic emission spectrometry Yoshinobu Kohara, Yasushi Terui, Megumi Ichikawa, Toshihiro Shirasaki, Kazuko Yamamoto, Tamotsu Yamamoto, Yuzuru Takamura
JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 27, 9, 1457-1464, 2012
Characteristics of liquid electrode plasma for atomic emission spectrometry Yoshinobu Kohara, Yasushi Terui, Megumi Ichikawa, Toshihiro Shirasaki, Kazuko Yamamoto, Tamotsu Yamamoto, Yuzuru Takamura
JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 27, 9, 1457-1464, 2012
Determination of Cadmium in Water Samples by Liquid Electrode Plasma Atomic Emission Spectrometry after Solid Phase Extraction Using a Mini Cartridge Packed with Chelate Resin Immobilizing Carboxymethylated Pentaethylenehexamine Shigehiro Kagaya, Saori Nakada, Yoshinori Inoue, Waka Kamichatani, Hideyuki Yanai, Mitsuru Saito, Tamotsu Yamamoto, Yuzuru Takamura, Koji Tohda
ANALYTICAL SCIENCES, 26, 4, 515-518, 2010
An optimal design method for preventing air bubbles in high-temperature microfluidic devices Tsuyoshi Nakayama, Ha Minh Hiep, Satoshi Furui, Yuji Yonezawa, Masato Saito, Yuzuru Takamura, Eiichi Tamiya
ANALYTICAL AND BIOANALYTICAL CHEMISTRY, 396, 1, 457-464, 2010
Electrochemical genosensor for the rapid detection of GMO using loop-mediated isothermal amplification Minhaz Uddin Ahmed, Masato Saito, M. Mosharraf Hossain, S. Ramachandara Rao, Satoshi Furui, Akihiro Hino, Yuzuru Takamura, Masahiro Takagi, Eiichi Tamiya
ANALYST, 134, 5, 966-972, 2009
Cell separation by an aqueous two-phase system in a microfluidic device Masatoshi Tsukamoto, Shu Taira, Shohei Yamamura, Yasutaka Morita, Naoki Nagatani, Yuzuru Takamura, Eiichi Tamiya
ANALYST, 134, 10, 1994-1998, 2009
Label-free optical detection of aptamer-protein interactions using gold-capped Do-Kyun Kim, Kagan Kerman, Ha Minh Hiep, Masato Saito, Shohei Yamamura, Yuzuru Takamura, Young-Soo Kwon, Eiichi Tamiya
ANALYTICAL BIOCHEMISTRY, 379, 1, 1-7, 2008
AFM picking-up manipulation of the metaphase chromosome fragment by using the tweezers-type probe Keiichiro Yamanaka, Masato Saito, Motoharu Shichiri, Sigeru Sugiyama, Yuzuru Takamura, Gen Hashiguchi, Eiichi Tamiya
ULTRAMICROSCOPY, 108, 9, 847-854, 2008
Carbon nanotube amperometric chips with pneumatic micropumps Yuichi Tsujita, Kenzo Maehashi, Kazuhiko Matsumoto, Miyuki Chikae, Soichiro Torai, Yuzuru Takamura, Eiichi Tamiya
JAPANESE JOURNAL OF APPLIED PHYSICS, 47, 4, 2064-2067, 2008
Development of a compact stacked flatbed reactor with immobilized high-density bacteria for hydrogen production Mitsuyoshi Ishikawa, Shohei Yamamura, Ryuzoh Ikeda, Yuzuru Takamura, Koji Sode, Eiichi Tamiya, Masamitsu Tomiyama
INTERNATIONAL JOURNAL OF HYDROGEN ENERGY, 33, 5, 1593-1597, 2008
Label-free detection of melittin binding to a membrane using electrochemical-localized surface plasmon resonance Hiep, Ha Minh, Endo, Tatsuro, Saito, Masato, Chikae, Miyuki, Kim, Do Kyun, Yamamura, Shohei, Takamura, Yuzuru, Tamiya, Eiichi
ANALYTICAL CHEMISTRY, 80, 6, 1859-1864, 2008
Rapid and sensitive visual detection of residual pesticides in food using acetylcholine sterase-based disposable membrane chips Nagatani, Naoki, Takeuchi, Akhiro, Hossain, M. Anwar, Yuhi, Teruko, Endo, Tatsuro, Kerman, Kagan, Takamura, Yuzuru, Tamiya, Eiichi
FOOD CONTROL, 18, 8, 914-920, 2007
A localized surface plasmon resonance based immunosensor for the detection of casein in milk Hiep, Ha Minh, Endo, Tatsuro, Kerman, Kagan, Chikae, Miyuki, Kim, Do-Kyun, Yamamura, Shohei, Takamura, Yuzuru, Tamiya, Eiichi
SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS, 8, 4, 331-338, 2007
Quantum dot-based immunosensor for the detection of prostate-specific antigen using fluorescence microscopy Kerman, Kagan, Endo, Tatsuro, Tsukamoto, Masatoshi, Chikae, Miyuki, Takamura, Yuzuru, Tamiya, Eiichi
TALANTA, 71, 4, 1494-1499, 2007
Quantum dot-based immunosensor for the detection of prostate-specific antigen using fluorescence microscopy Kerman, Kagan, Endo, Tatsuro, Tsukamoto, Masatoshi, Chikae, Miyuki, Takamura, Yuzuru, Tamiya, Eiichi
TALANTA, 71, 4, 1494-1499, 2007
Influences of electroosmotic flows in nanopillar chips on DNA separation: Experimental results and numerical simulations Noritada Kaji, Akio Oki, Ryo Ogawa, Yuzuru Takamura, Takahiro Nishimoto, Hiroaki Nakanishi, Yasuhiro Horiike, Manabu Tokeshi, Yoshinobu Baba
ISRAEL JOURNAL OF CHEMISTRY, 47, 2, 161-169, 2007
Circumventing air bubbles in microfluidic systems and quantitative continuous-flow PCR applications Tsuyoshi Nakayama, Yasunori Kurosawa, Satoshi Furui, Kagan Kerman, Masaaki Kobayashi, S. Ramachandra Rao, Yuji Yonezawa, Kouichi Nakano, Akihiro Hino, Shohei Yamamura, Yuzuru Takamura, Eiichi Tamiya
ANALYTICAL AND BIOANALYTICAL CHEMISTRY, 386, 5, 1327-1333, 2006
Circumventing air bubbles in microfluidic systems and quantitative continuous-flow PCR applications Tsuyoshi Nakayama, Yasunori Kurosawa, Satoshi Furui, Kagan Kerman, Masaaki Kobayashi, S. Ramachandra Rao, Yuji Yonezawa, Kouichi Nakano, Akihiro Hino, Shohei Yamamura, Yuzuru Takamura, Eiichi Tamiya
ANALYTICAL AND BIOANALYTICAL CHEMISTRY, 386, 5, 1327-1333, 2006
A novel enhancement assay for immunochromatographic test strips using gold nanoparticles Tanaka, Ryo, Yuhi, Teruko, Nagatani, Naoki, Endo, Tatsuro, Kerman, Kagan, Takamura, Yuzuru, Tamiya, Eiichi
ANALYTICAL AND BIOANALYTICAL CHEMISTRY, 385, 8, 1414-1420, 2006
Direct fabrication of catalytic metal nanoparticles onto the surface of a screen-printed carbon electrode Miyuki Chikae, Koutarou Idegami, Kagan Kerman, Naoki Nagatani, Mitsuyoshi Ishikawa, Yuzuru Takamura, Eiichi Tamiya
ELECTROCHEMISTRY COMMUNICATIONS, 8, 8, 1375-1380, 2006
Direct fabrication of catalytic metal nanoparticles onto the surface of a screen-printed carbon electrode Miyuki Chikae, Koutarou Idegami, Kagan Kerman, Naoki Nagatani, Mitsuyoshi Ishikawa, Yuzuru Takamura, Eiichi Tamiya
ELECTROCHEMISTRY COMMUNICATIONS, 8, 8, 1375-1380, 2006
A novel enhancement assay for immunochromatographic test strips using gold nanoparticles Tanaka, Ryo, Yuhi, Teruko, Nagatani, Naoki, Endo, Tatsuro, Kerman, Kagan, Takamura, Yuzuru, Tamiya, Eiichi
ANALYTICAL AND BIOANALYTICAL CHEMISTRY, 385, 8, 1414-1420, 2006
Resin-based micropipette tip for immunochromatographic assays in urine samples Yuhi, Teruko, Nagatani, Naoki, Endo, Tatsuro, Kerman, Kagan, Takata, Masayuki, Konaka, Hiroyuki, Namiki, Mikio, Takamura, Yuzuru, Tamiya, Eiichi
JOURNAL OF IMMUNOLOGICAL METHODS, 312, 1-2, 54-60, 2006
Gold nanoparticle based immunochromatography using a resin modified micropipette tip for rapid and simple detection of human chorionic gonadotropin hormone and prostate-specific antigen Yuhi, Teruko, Nagatani, Naoki, Endo, Tatsuro, Kerman, Kagan, Takata, Masayuki, Konaka, Hiroyuki, Namiki, Mikio, Takamura, Yuzuru, Tamiya, Eiichi
SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS, 7, 3, 276-281, 2006
Gold nanoparticle-based novel enhancement method for the development of highly sensitive immunochromatographic test strips Nagatani, Naoki, Tanaka, Ryou, Yuhi, Teruko, Endo, Tatsuro, Kerman, Kagan, Takamura, Yuzuru, Tamiya, Ehchi
SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS, 7, 3, 270-275, 2006
Constraining the connectivity of neuronal networks cultured on microelectrode arrays with microfluidic techniques: A step towards neuron-based functional chips F Morin, N Nishimura, L Griscom, B LePioufle, H Fujita, Y Takamura, E Tamiya
BIOSENSORS & BIOELECTRONICS, 21, 7, 1093-1100, 2006
Fluorescence-based assay with enzyme amplification on a micro-flow immunosensor chip for monitoring coplanar polychlorinated biphenyls T Endo, A Okuyama, Y Matsubara, K Nishi, M Kobayashi, S Yamamura, Y Morita, Y Takamura, H Mizukami, E Tamiya
ANALYTICA CHIMICA ACTA, 531, 1, 7-13, 2005
High-throughput screening and analysis for antigen specific single-cell using microarray S Yamamura, Rao, SR, M Omori, Y Tokimitsu, S Kondo, H Kishi, A Muraguchi, Y Takamura, E Tamiya
Micro Total Analysis Systems 2004, Vol 1, 296, 78-80, 2005
Effect of electroosmotic flow in nanopillar chips on DNA separation: Experimental results and numerical simulations N Kaji, Y Tezuka, Y Takamura, T Nishimoto, H Nakanishi, Y Horiike, Y Baba
Micro Total Analysis Systems 2004, Vol 2, 297, 210-212, 2005
On-chip nanoliter-volume multiplex TaqMan polymerase chain reaction from a single copy based on counting fluorescence released microchambers Matsubara, V, H Kerman, M Kobayashi, S Yamamura, Morita, V, Y Takamura, E Tamiya
ANALYTICAL CHEMISTRY, 76, 21, 6434-6439, 2004
Separation of long DNA molecules by quartz nanopillar chips under a direct current electric field N Kaji, Y Tezuka, Y Takamura, M Ueda, T Nishimoto, H Nakanishi, Y Horiike, Y Baba
ANALYTICAL CHEMISTRY, 76, 1, 15-22, 2004
Nano-Biodevice for Genomic Drug Discovery and Genomic Medicine. Noritada Kaji, Yoshinobu Baba, Yojiro Tezuka, Yuzuru Takamura, Yasuhiro Horiike, Takahiro Nishimoto, Hiroaki Nakanishi
Proceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004, 498-499, 2004
Biochips aiming at advanced medical treatment Y. Horiike, A. Oki, H. Ogawa, H. Onoda, M. Takai, H. Inokuchi, Y. Tezuka, S. Adachi, T. Fukasawa, Y. Takamura
Lab-on-a-Chip: Miniaturized Systems for (Bio) Chemical Analysis and Synthesis, 335-371, 2003
Study on elemental technologies for creation of healthcare chip fabricated on polyethylene terephthalate plate A Oki, Y Takamura, T Fukasawa, H Ogawa, Y Ito, T Ichiki, Y Horiike
IEICE TRANSACTIONS ON ELECTRONICS, E84C, 12, 1801-1806, 2001
Fine/high aspect ratio SiO2 hole and gap etching Y Horiike, M Ogata, H Oshio, Y Chinzei, Y Feurprier, Y Takamura, T Ichiki
ULSI PROCESS INTEGRATION, 99, 18, 329-344, 1999